Wafer-scale colloidal lithography based on self-assembly of polystyrene nanospheres and atomic layer deposition

Published 2010 View Full Article

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Title
Wafer-scale colloidal lithography based on self-assembly of polystyrene nanospheres and atomic layer deposition
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 20, Issue 24, Pages 5025
Publisher
Royal Society of Chemistry (RSC)
Online
2010-05-17
DOI
10.1039/b927532k

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