Hydroxyphenylbenzene derivatives as glass forming molecules for high resolution photoresists

Title
Hydroxyphenylbenzene derivatives as glass forming molecules for high resolution photoresists
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 18, Issue 16, Pages 1903
Publisher
Royal Society of Chemistry (RSC)
Online
2008-03-06
DOI
10.1039/b719108a

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