Journal
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Volume 322, Issue 18, Pages 2762-2768Publisher
ELSEVIER
DOI: 10.1016/j.jmmm.2010.04.023
Keywords
Hard drive; Perpendicular magnetic recording; CoPd multilayer; Multilayer medium; Nanoimprint lithography
Funding
- EC [G5RD-CT-2002-00731]
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Magnetic nano-patterning of perpendicular hard disk media with perpendicular anisotropy, but preserving disk surface planarity, is presented here. Reactive ion implantation is used to locally modify the chemical composition(hence the magnetization and magnetic anisotropy) of the Co/Pd multilayer in irradiated areas. The procedure involves low energy, chemically reactive ion irradiation through a resist mask. Among N, P and As ions, P are shown to be most adequate to obtain optimum bit density and topography flatness for industrial Co/Pd multilayer media. The effect of this ion contributes to isolate perpendicular bits by destroying both anisotropy and magnetic exchange in the irradiated areas. Low ion fluences are effective due to the stabilization of atomic displacement levels by the chemical effect of covalent impurities. (C) 2010 Elsevier B.V. All rights reserved.
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