Silicon Micro-Machines for Fun and Profit

Published 2012 View Full Article

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Title
Silicon Micro-Machines for Fun and Profit
Authors
Keywords
-
Journal
JOURNAL OF LOW TEMPERATURE PHYSICS
Volume 169, Issue 5-6, Pages 386-399
Publisher
Springer Nature
Online
2012-07-20
DOI
10.1007/s10909-012-0654-z

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