Low-Loss Titanium Dioxide Strip Waveguides Fabricated by Atomic Layer Deposition

Published 2013 View Full Article

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Title
Low-Loss Titanium Dioxide Strip Waveguides Fabricated by Atomic Layer Deposition
Authors
Keywords
-
Journal
JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 32, Issue 2, Pages 208-212
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-12-18
DOI
10.1109/jlt.2013.2291960
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