Compact Integration of Optical Sources and Detectors on SOI for Optical Interconnects Fabricated in a 200 mm CMOS Pilot Line

Title
Compact Integration of Optical Sources and Detectors on SOI for Optical Interconnects Fabricated in a 200 mm CMOS Pilot Line
Authors
Keywords
-
Journal
JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 30, Issue 11, Pages 1764-1770
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-03-06
DOI
10.1109/jlt.2012.2189871

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