4.7 Article

A Design Procedure for High-Performance, Rib-Waveguide-Based Multimode Interference Couplers in Silicon-on-Insulator

Journal

JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 26, Issue 13-16, Pages 2928-2936

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2007.914511

Keywords

Design; multimode interference (MMI); rib waveguide; silicon-on-insulator

Funding

  1. Spanish Ministerio de Educacion y Ciencia [TEC2006-02868]
  2. FPU [AP-2006-03355]

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Single mode silicon-on-insulator rib waveguides offer a weak lateral confinement, which makes it difficult to design high-performance multimode interference couplers (MMIs) based on these waveguides. Here, a complete design procedure for single etch step MMIs with tapered rib access waveguides is presented, which yields low excess loss (0.1 dB) and good imbalance (0.02 dB). Furthermore, polarization dependence is low, and high fabrication tolerances are achieved, especially with respect to etch depth.

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