Fabrication of Novel Structures on Silicon with Femtosecond Laser Pulses

Published 2010 View Full Article

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Title
Fabrication of Novel Structures on Silicon with Femtosecond Laser Pulses
Authors
Keywords
-
Journal
Journal of Laser Micro Nanoengineering
Volume 5, Issue 3, Pages 229-232
Publisher
Japan Laser Processing Society
Online
2010-12-09
DOI
10.2961/jlmn.2010.03.0009

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