Nano- and Microstructuring of SiO2 and Sapphire with Fs-laser Induced Selective Etching

Published 2010 View Full Article

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Title
Nano- and Microstructuring of SiO2 and Sapphire with Fs-laser Induced Selective Etching
Authors
Keywords
-
Journal
Journal of Laser Micro Nanoengineering
Volume 4, Issue 2, Pages 135-140
Publisher
Japan Laser Processing Society
Online
2010-07-29
DOI
10.2961/jlmn.2009.02.0011

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