Local Laser Oxidation of Thin Metal Films: Ultra-resolution in Theory and in Practice

Published 2010 View Full Article

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Title
Local Laser Oxidation of Thin Metal Films: Ultra-resolution in Theory and in Practice
Authors
Keywords
-
Journal
Journal of Laser Micro Nanoengineering
Volume 3, Issue 3, Pages 201-205
Publisher
Japan Laser Processing Society
Online
2010-07-20
DOI
10.2961/jlmn.2008.03.0013

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