Wafer defect inspection by neural analysis of region features

Published 2009 View Full Article

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Title
Wafer defect inspection by neural analysis of region features
Authors
Keywords
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Journal
JOURNAL OF INTELLIGENT MANUFACTURING
Volume 22, Issue 6, Pages 953-964
Publisher
Springer Nature
Online
2009-12-22
DOI
10.1007/s10845-009-0369-4
References
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