Ultrahigh-Q silicon resonators in a planarized local oxidation of silicon platform

Published 2015 View Full Article

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Title
Ultrahigh-Q silicon resonators in a planarized local oxidation of silicon platform
Authors
Keywords
-
Journal
OPTICS LETTERS
Volume 40, Issue 9, Pages 1892
Publisher
The Optical Society
Online
2015-04-16
DOI
10.1364/ol.40.001892

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