Sub-100nm resolution PSIM by utilizing modified optical vortices with fractional topological charges for precise phase shifting

Published 2015 View Full Article

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Title
Sub-100nm resolution PSIM by utilizing modified optical vortices with fractional topological charges for precise phase shifting
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 23, Issue 23, Pages 30143
Publisher
The Optical Society
Online
2015-11-11
DOI
10.1364/oe.23.030143

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