Nanoparticle containing channel waveguides produced by a multi-energy masked ion-implantation process

Title
Nanoparticle containing channel waveguides produced by a multi-energy masked ion-implantation process
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 23, Issue 3, Pages 3176
Publisher
The Optical Society
Online
2015-02-03
DOI
10.1364/oe.23.003176

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