4.6 Article

Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators

Journal

OPTICS EXPRESS
Volume 23, Issue 12, Pages 15477-15490

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OE.23.015477

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Funding

  1. National Science Foundation [NSF ECCS-1201659]
  2. Div Of Electrical, Commun & Cyber Sys
  3. Directorate For Engineering [1201659] Funding Source: National Science Foundation

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We present a fully-integrated monolithic aluminum nitride optomechanical device in which lateral vibrations generated by a piezoelectric contour mode acoustic ring resonator are used to produce amplitude modulation of an optical signal in a whispering gallery mode photonic ring resonator. Acoustic and optical resonances are independently characterized in this contour mode optomechanical resonator (CMOMR). Electrically driven mechanical modes are optically detected at 35MHz, 654MHz and 884MHz. (C) 2015 Optical Society of America

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