Error motion compensating tracking interferometer for the position measurement of objects with rotational degree of freedom

Published 2015 View Full Article

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Title
Error motion compensating tracking interferometer for the position measurement of objects with rotational degree of freedom
Authors
Keywords
-
Journal
OPTICAL ENGINEERING
Volume 54, Issue 5, Pages 054101
Publisher
SPIE-Intl Soc Optical Eng
Online
2015-05-13
DOI
10.1117/1.oe.54.5.054101

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