Composition and crystal structure of N doped TiO2 film deposited at different O2 flow rate by direct current sputtering

Published 2011 View Full Article

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Title
Composition and crystal structure of N doped TiO2 film deposited at different O2 flow rate by direct current sputtering
Authors
Keywords
-
Journal
JOURNAL OF ENVIRONMENTAL SCIENCES
Volume 23, Issue -, Pages S119-S123
Publisher
Elsevier BV
Online
2011-09-12
DOI
10.1016/s1001-0742(11)61091-7

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