Titanium-Based Getter Solution for Wafer-Level MEMS Vacuum Packaging

Published 2012 View Full Article

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Title
Titanium-Based Getter Solution for Wafer-Level MEMS Vacuum Packaging
Authors
Keywords
Vacuum packaging, getter, sacrificial layer, activation, outgassing, regeneration cycles
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 42, Issue 3, Pages 485-491
Publisher
Springer Nature
Online
2012-12-08
DOI
10.1007/s11664-012-2350-9
References
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