Imaging of Metal Impurities in Silicon by Luminescence Spectroscopy and Synchrotron Techniques

Published 2010 View Full Article

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Title
Imaging of Metal Impurities in Silicon by Luminescence Spectroscopy and Synchrotron Techniques
Authors
Keywords
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Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 39, Issue 6, Pages 787-793
Publisher
Springer Nature
Online
2010-03-02
DOI
10.1007/s11664-010-1114-7
References
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