Electron Scattering Mechanism of FTO Films Grown by Spray Pyrolysis Method

Transparent conducting thin films of fluorine-doped SnO(2) (FTO) were deposited on glass substrates by spray pyrolysis. This work studies electron scattering mechanisms of the FTO films through analysis of the temperature-dependent mobility. The mechanisms of lattice vibration and dislocation scattering were not important in the degenerate FTO films. The mean free path was found to be considerably smaller than the grain size, suggesting that ionized impurity and/or neutral impurity scattering are the dominant scattering mechanisms.