Fabrication and Evaluation of a Thermoelectric Microdevice on a Free-Standing Substrate

Published 2009 View Full Article

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Title
Fabrication and Evaluation of a Thermoelectric Microdevice on a Free-Standing Substrate
Authors
Keywords
-
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 38, Issue 7, Pages 1326-1330
Publisher
Springer Nature
Online
2009-04-28
DOI
10.1007/s11664-009-0819-y

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