Low-Temperature Pulsed-PECVD ZnO Thin-Film Transistors

Published 2009 View Full Article

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Title
Low-Temperature Pulsed-PECVD ZnO Thin-Film Transistors
Authors
Keywords
-
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 39, Issue 5, Pages 554-558
Publisher
Springer Nature
Online
2009-11-18
DOI
10.1007/s11664-009-0995-9

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