Magnification-continuous static calibration model of a scanning-electron microscope

Published 2013 View Full Article

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Title
Magnification-continuous static calibration model of a scanning-electron microscope
Authors
Keywords
-
Journal
JOURNAL OF ELECTRONIC IMAGING
Volume 21, Issue 3, Pages 033020-1
Publisher
SPIE-Intl Soc Optical Eng
Online
2013-01-26
DOI
10.1117/1.jei.21.3.033020

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