XPS and angle resolved XPS, in the semiconductor industry: Characterization and metrology control of ultra-thin films

Published 2010 View Full Article

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Title
XPS and angle resolved XPS, in the semiconductor industry: Characterization and metrology control of ultra-thin films
Authors
Keywords
-
Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 178-179, Issue -, Pages 433-448
Publisher
Elsevier BV
Online
2010-03-15
DOI
10.1016/j.elspec.2010.03.008

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