Journal
JOURNAL OF ELECTRON MICROSCOPY
Volume 57, Issue 4, Pages 123-127Publisher
OXFORD UNIV PRESS
DOI: 10.1093/jmicro/dfn010
Keywords
confocal scanning transmission electron microscopy; stage-scanning system; piezo actuators; optical sectioning; three-dimensional scanning; pin-hole
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A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.
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