A High-Speed Single Crystal Silicon AFM Probe Integrated with PZT Actuator for High-Speed Imaging Applications

Title
A High-Speed Single Crystal Silicon AFM Probe Integrated with PZT Actuator for High-Speed Imaging Applications
Authors
Keywords
-
Journal
Journal of Electrical Engineering & Technology
Volume 6, Issue 1, Pages 119-122
Publisher
Informa UK Limited
Online
2011-04-04
DOI
10.5370/jeet.2011.6.1.119

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