Nano-Crystalline Silicon-Based Bottom Gate Thin-Film Transistor Grown by LTPECVD With Hydrogen-Free He Diluted ${\hbox{SiH}} _{4}$

Published 2013 View Full Article

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Title
Nano-Crystalline Silicon-Based Bottom Gate Thin-Film Transistor Grown by LTPECVD With Hydrogen-Free He Diluted ${\hbox{SiH}} _{4}$
Authors
Keywords
-
Journal
Journal of Display Technology
Volume 9, Issue 7, Pages 536-544
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-03-12
DOI
10.1109/jdt.2013.2241015

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