Self-Aligned Top-Gate Coplanar In-Ga-Zn-O Thin-Film Transistors

Title
Self-Aligned Top-Gate Coplanar In-Ga-Zn-O Thin-Film Transistors
Authors
Keywords
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Journal
Journal of Display Technology
Volume 5, Issue 12, Pages 515-519
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-11-21
DOI
10.1109/jdt.2009.2026189

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