4.0 Article

Defect Identification in Large Area Electronic Backplanes

Journal

JOURNAL OF DISPLAY TECHNOLOGY
Volume 5, Issue 1-3, Pages 27-33

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JDT.2008.2004858

Keywords

Amorphous silicon; thin-film transistor (TFT); backplanes; testing; defects

Funding

  1. NIST ATP [70NANB3H3029]

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We describe a rapid testing system for active matrix thin-film transistor (TFT) backplanes which enables the identification of many common processing defects. The technique spatially maps the charge feedthrough from TFTs in the pixel and is suited for pixels with switched-capacitor architecture.

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