Realization of a diamond based high density multi electrode array by means of Deep Ion Beam Lithography

Published 2015 View Full Article

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Title
Realization of a diamond based high density multi electrode array by means of Deep Ion Beam Lithography
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 348, Issue -, Pages 199-202
Publisher
Elsevier BV
Online
2015-01-02
DOI
10.1016/j.nimb.2014.11.119

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