Molecular dynamic simulation of low-energy FIB irradiation induced damage in diamond

Published 2015 View Full Article

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Title
Molecular dynamic simulation of low-energy FIB irradiation induced damage in diamond
Authors
Keywords
Molecular dynamics, Focused ion beam, Irradiation damage, Amorphization, Collision cascades
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 358, Issue -, Pages 38-44
Publisher
Elsevier BV
Online
2015-05-26
DOI
10.1016/j.nimb.2015.05.023

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