Development of ion sources: Towards high brightness for proton beam writing applications

Published 2015 View Full Article

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Title
Development of ion sources: Towards high brightness for proton beam writing applications
Authors
Keywords
Proton beam writing, Ion source, Ion source reduced brightness
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 348, Issue -, Pages 23-28
Publisher
Elsevier BV
Online
2015-02-06
DOI
10.1016/j.nimb.2015.01.017

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