Automatic beam focusing in the 2nd generation PBW line at sub-10nm line resolution

Published 2015 View Full Article

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Title
Automatic beam focusing in the 2nd generation PBW line at sub-10nm line resolution
Authors
Keywords
Proton beam writing, LabVIEW, Automatic focusing, Sub-10, nm
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 348, Issue -, Pages 203-208
Publisher
Elsevier BV
Online
2015-01-14
DOI
10.1016/j.nimb.2014.12.066

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