Plume propagation and Pt film growth during shadow-masked pulsed laser deposition in a buffer Ar gas

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Title
Plume propagation and Pt film growth during shadow-masked pulsed laser deposition in a buffer Ar gas
Authors
Keywords
Pulsed laser deposition, Mask, Modeling, Thin film growth, Laser plume propagation
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 343, Issue -, Pages 52-61
Publisher
Elsevier BV
Online
2014-11-26
DOI
10.1016/j.nimb.2014.11.023

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