Influence of film thickness on the morphological and electrical properties of epitaxial TiC films deposited by reactive magnetron sputtering on MgO substrates

Published 2013 View Full Article

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Title
Influence of film thickness on the morphological and electrical properties of epitaxial TiC films deposited by reactive magnetron sputtering on MgO substrates
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 389, Issue -, Pages 92-98
Publisher
Elsevier BV
Online
2013-12-02
DOI
10.1016/j.jcrysgro.2013.11.076

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