The impact of pressure and temperature on growth rate and layer uniformity in the sublimation growth of AlN crystals

Title
The impact of pressure and temperature on growth rate and layer uniformity in the sublimation growth of AlN crystals
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 338, Issue 1, Pages 69-74
Publisher
Elsevier BV
Online
2011-11-21
DOI
10.1016/j.jcrysgro.2011.11.030

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