Multicycle rapid thermal annealing technique and its application for the electrical activation of Mg implanted in GaN

Published 2011 View Full Article

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Title
Multicycle rapid thermal annealing technique and its application for the electrical activation of Mg implanted in GaN
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 350, Issue 1, Pages 21-26
Publisher
Elsevier BV
Online
2011-12-14
DOI
10.1016/j.jcrysgro.2011.12.016

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