Atomic layer deposition of TaN and Ta3N5 using pentakis(dimethylamino)tantalum and either ammonia or monomethylhydrazine

Published 2011 View Full Article

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Title
Atomic layer deposition of TaN and Ta3N5 using pentakis(dimethylamino)tantalum and either ammonia or monomethylhydrazine
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 331, Issue 1, Pages 33-39
Publisher
Elsevier BV
Online
2011-07-25
DOI
10.1016/j.jcrysgro.2011.07.012

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