4.4 Article Proceedings Paper

High-resolution X-ray diffraction investigations of the microstructure of MOVPE grown a-plane AlGaN epilayers

Journal

JOURNAL OF CRYSTAL GROWTH
Volume 315, Issue 1, Pages 208-210

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2010.09.003

Keywords

High-resolution X-ray diffraction; Metalorganic vapor phase epitaxy; Non-polar; Semiconducting III-V materials

Ask authors/readers for more resources

We report a comprehensive characterization of the microstructure of non-polar (1 1 (2) over bar 0) a-plane Al(x)Ga(1-x)N epilayers on (1 (1) over bar 0 2) r-plane sapphire substrates over the entire Al composition range using high-resolution X-ray diffraction. All a-plane AlGaN epilayers show an anisotropic in-plane mosaicity which is strongly influenced by Al incorporation and growth conditions. We use data from symmetric and skew-symmetric reflections combined with Williamson-Hall analysis to estimate the mosaic parameters and follow trends across the Al composition. We also analyze the dependence of the microstructure on thickness for a set of Al(0.5)Ga(0.5)N epilayers. (C) 2010 Elsevier B.V. All rights reserved.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.4
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Computer Science, Information Systems

Metal Organic Vapor Phase Epitaxy of Thick N-Polar InGaN Films

Nirupam Hatui, Athith Krishna, Shubhra S. Pasayat, Stacia Keller, Umesh K. Mishra

Summary: Hillock-free thick InGaN layers were successfully grown on N-polar GaN on sapphire by introducing Mg as an additional surfactant and optimizing the H-2 pulse time. Despite adversely affecting In incorporation, Mg enabled the maintenance of good surface morphology while decreasing growth temperature, resulting in a net increase in In composition. The parameter space of growth temperature and Mg precursor flow for obtaining hillock-free epilayers was mapped out.

ELECTRONICS (2021)

Article Physics, Applied

2DEGs formed in AlN/GaN HEMT structures with AlN grown at low temperature

Caroline E. Reilly, Nirupam Hatui, Thomas E. Mates, Shuji Nakamura, Steven P. DenBaars, Stacia Keller

Summary: This research explores the growth of AlN at temperatures below 550 degrees C via MOCVD using a flow-modulated epitaxy scheme, investigating the morphological, compositional, and electronic properties of the films. The study reveals high sheet charges and mobilities for two dimensional electron gases formed at the interface between the low temperature grown AlN layers and the high temperature deposited semi-insulating GaN base layers. Despite low growth temperatures, unintentional gallium incorporation is observed in nominally pure AlN barrier layers near the GaN interface. These results pave the way for the integration of nitride-based electronics on temperature sensitive substrates via epitaxy-based schemes.

APPLIED PHYSICS LETTERS (2021)

Article Engineering, Electrical & Electronic

Influence of Nucleation Layers on MOVPE Growth of Semipolar (11(2)over-bar2) GaN on m-Plane Sapphire

A. Azizur Rahman, Nirupam Hatui, Carina B. Maliakkal, Priti Gupta, Jayesh B. Parmar, Bhagyashree A. Chalke, Arnab Bhattacharya

Summary: The study found that the choice of nucleation layer significantly affects the properties of semipolar GaN epilayers. Direct growth of (112 over bar 2) GaN without buffer layers provided the best crystal quality and relatively enhanced near-band-edge photoluminescence emission.

JOURNAL OF ELECTRONIC MATERIALS (2021)

Article Physics, Applied

Demonstration of device-quality 60% relaxed In0.2Ga0.8N on porous GaN pseudo-substrates grown by PAMBE

Christian Wurm, Henry Collins, Nirupam Hatui, Weiyi Li, Shubhra Pasayat, Robert Hamwey, Kai Sun, Islam Sayed, Kamruzzaman Khan, Elaheh Ahmadi, Stacia Keller, Umesh Mishra

Summary: This study demonstrates the achievement of high-quality and relaxed InGaN substrates by growing on a GaN-on-porous GaN pseudo-substrate. Thicker films with higher In composition and smooth surface morphology can be achieved, making them suitable for III-nitride based optoelectronics.

JOURNAL OF APPLIED PHYSICS (2022)

Article Physics, Applied

Acceptor traps as the source of holes in p-type N-polar GaN/(AlN/AlGaN) superlattices

Athith Krishna, Aditya Raj, Nirupam Hatui, Stacia Keller, Steven Denbaars, Umesh K. Mishra

Summary: This study experimentally demonstrates the existence of acceptor traps acting as the source of holes in N-polar p-type modulation doped GaN/(AlN/AlGaN) superlattices. The ionization of acceptor traps explains the higher measured hole concentration compared to the dopants used during growth. The study also provides evidence for the charge-balance in systems showing p-type behavior without sufficient doping.

APPLIED PHYSICS LETTERS (2022)

Article Crystallography

Demonstration of Acceptor-Like Traps at Positive Polarization Interfaces in Ga-Polar P-type (AlGaN/AlN)/GaN Superlattices

Athith Krishna, Aditya Raj, Nirupam Hatui, Stacia Keller, Umesh K. Mishra

Summary: The shortcomings in acceptors of p-type III-nitride semiconductors have resulted in limited research on p-channel electronic devices. This study experimentally demonstrates the presence of acceptor-like traps in Ga-polar p-type uniformly doped (AlGaN/AlN)/GaN SLs with limited Mg doping, acting as the primary source of holes.

CRYSTALS (2022)

Article Materials Science, Multidisciplinary

Synthesis of Cu3SbS4, Cu3SbSe4 and CuSbTe2 thin films via chalcogenation of sputtered Cu-Sb metal precursors

A. Azizur Rahman, Arnab Bhattacharya, Arun Sarma

Summary: Cu-Sb-X (X = S, Se, Te) based ternary chalcogenide semiconductors, including Cu3SbS4, Cu3SbSe4, and CuSbTe2, were successfully synthesized by a two-stage process. The synthesized thin films exhibited good crystallinity and optical properties, as confirmed by x-ray diffraction, elemental analyses, scanning electron microscopy, optical spectroscopy, and Raman spectroscopy.

THIN SOLID FILMS (2022)

Article Materials Science, Multidisciplinary

Terahertz optical properties and birefringence in single crystal vanadium doped (100) β-Ga2O3

Ajinkya Punjal, Shraddha Choudhary, Maneesha Narayanan, Dhanashree Chemate, Ruta Kulkarni, Arumugam Thamizhavel, Arnab Bhattacharya, S. S. Prabhu

Summary: The terahertz optical properties of vanadium-doped beta-Ga2O3 were studied using terahertz time-domain spectroscopy, showing strong birefringence in the 0.2-2.4 THz range and acting as both a quarter-waveplate and a half-waveplate at specific frequencies.

OPTICAL MATERIALS EXPRESS (2022)

Article Crystallography

Fully Relaxed, Crack-Free AlGaN with upto 50% Al Composition Grown on Porous GaN Pseudo-Substrate

Nirupam Hatui, Henry Collins, Emmanuel Kayede, Shubhra S. Pasayat, Weiyi Li, Stacia Keller, Umesh K. Mishra

Summary: In this study, fully relaxed and crack-free AlxGa1-xN layers with high Al composition were demonstrated on pseudo-substrates. The growth conditions not only allowed for high quality films, but also suppressed sidewall growth.

CRYSTALS (2022)

Article Engineering, Electrical & Electronic

GaN/AlGaN Superlattice Based E-Mode Hole Channel FinFET With Schottky Gate

Aditya Raj, Athith Krishna, Brian Romanczyk, Nirupam Hatui, Wenjian Liu, Stacia Keller, Umesh K. Mishra

Summary: In this study, a normally-off hole channel FinFET device based on GaN/AlGaN superlattice is reported. By combining Schottky gate with 60 nm wide fins, enhancement mode operation is achieved. The device has an on-current of 13 mA/mm and an on-resistance of 300 Omega.mm. Simultaneously, a large I-on/I-off ratio (>10^7) and a current modulation of more than two orders of magnitude in the enhancement mode regime are also achieved.

IEEE ELECTRON DEVICE LETTERS (2023)

Article Engineering, Electrical & Electronic

Record RF Power Performance at 94 GHz From Millimeter-Wave N-Polar GaN-on-Sapphire Deep-Recess HEMTs

Weiyi Li, Brian Romanczyk, Matthew Guidry, Emre Akso, Nirupam Hatui, Christian Wurm, Wenjian Liu, Pawana Shrestha, Henry Collins, Christopher Clymore, Stacia Keller, Umesh K. Mishra

Summary: This article presents breakthrough N-polar GaN-on-sapphire deep-recess metal-insulator-semiconductor (MIS)-high-electron-mobility transistors (HEMTs) with outstanding performance at W-band. The use of a thin GaN cap layer, atomic layer deposition (ALD) ruthenium (Ru) gate metallization, and high-quality GaN-on-sapphire epitaxy contributes to the excellent power performance achieved. The N-polar GaN-on-sapphire technology shows great potential for millimeter-wave power amplifier applications with high efficiency and power density.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2023)

Article Engineering, Electrical & Electronic

First Demonstration of Four-Finger N-polar GaN HEMT Exhibiting Record 712-mW Output Power With 31.7% PAE at 94 GHz

Emre Akso, Henry Collins, Christopher Clymore, Weiyi Li, Matthew Guidry, Brian Romanczyk, Christian Wurm, Wenjian Liu, Nirupam Hatui, Robert Hamwey, Pawana Shrestha, Stacia Keller, Umesh K. Mishra

Summary: This study presents a N-polar GaN high-electron-mobility transistor (HEMT) with an outstanding large signal performance at 94 GHz. The device demonstrates a record output power of 712 mW (7.1 W/mm) with 31.7% power-added efficiency (PAE). The study also explores the design considerations for multifinger devices and the best gain performance for > 1 W. The results show the great potential of multifinger N-polar GaN HEMT technology for state-of-the-art W-band power amplifiers.

IEEE MICROWAVE AND WIRELESS TECHNOLOGY LETTERS (2023)

Proceedings Paper Engineering, Electrical & Electronic

Improved N-polar GaN mm-wave Linearity, Efficiency, and Noise

Matthew Guidry, Pawana Shrestha, Wenjian Liu, Brian Romanczyk, Nirupam Hatui, Christian Wurm, Rohit Karnaty, Haoran Li, Elaheh Ahmadi, Stacia Keller, James F. Buckwalter, Umesh K. Mishra

Summary: This manuscript presents the record-breaking performance of N-polar GaN deep recess MISHEMTs devices under continuous wave conditions, as well as several advancements including high OIP3 and low noise figure achieved through the zero-crossing of g(m3) at the peak of OIP3, reduced bias sensitivity of distortion, and power consumption reduction through fabrication process.

2022 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS 2022) (2022)

Proceedings Paper Engineering, Electrical & Electronic

GaN/AlGaN superlattice based E-mode p-channel MES-FinFET with regrown contacts and >50 mA/mm on-current

A. Raj, A. Krishna, N. Hatui, B. Romanczyk, C. Wurm, M. Guidry, R. Hamwey, N. Pakala, S. Keller, U. K. Mishra

Summary: In this study, GaN/AlGaN superlattice based MESFinFET devices were reported with MOCVD regrown p(+) contacts around the fins, achieving a normally-off operation with an on-current of 65 mA/mm and a large I-on/I-off >10^7. This represents a significant advancement in the development of large band gap pFET devices for efficient high voltage CMOS platforms in power conversion applications.

2021 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) (2021)

Article Chemistry, Multidisciplinary

Doping controlled Fano resonance in bilayer 1T′-ReS2: Raman experiments and first-principles theoretical analysis

Subhadip Das, Suchitra Prasad, Biswanath Chakraborty, Bhakti Jariwala, Sai Shradha, D. V. S. Muthu, Arnab Bhattacharya, U. V. Waghmare, A. K. Sood

Summary: In this study, the impact of electron doping on the vibrational modes of a bilayer ReS2 channel in a field-effect transistor was analyzed using Raman spectroscopy. The results showed that the frequency and linewidth of in-plane vibrational modes were affected by doping, while the out-of-plane modes remained unaffected. Density functional theory calculations provided a quantitative understanding of the strong electron-phonon coupling in the in-plane modes, which was attributed to a structural phase transition in ReS2.

NANOSCALE (2021)

Article Crystallography

Study of AlN growth using AMEC Prismo HiT3 MOCVD reactor

Jianzheng Hu, Long Yan, Ning Zhou, Yao Chen, Xiaoni Yang, Lianqiao Yang, Shiping Guo

Summary: The effect and mechanism of carrier gas velocity, V/III ratio, and carrier gas velocity match on the growth rate of AlN were investigated in this study. The results showed that the growth rate of AlN initially increased with hydrogen flow rate, reached saturation, and then decreased monotonically. The turning point value depended on the equipment and process. By increasing the MO VM, the growth rate of AlN could be improved, but the uniformity deteriorated due to turbulence and loss of uniform boundary layer. High quality AlN films were successfully grown on nano-patterned sapphire substrates with improved crystalline quality and atomic smooth surfaces.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Molecular dynamics simulation of homogeneous nucleation of melting in superheated sodium crystal

Tingting Ma, Yang Li, Kangning Sun, Qinglin Cheng, Sen Li

Summary: This study investigates the melting process and nucleation behavior of sodium crystals using molecular dynamics simulation. The results show good agreement between simulated and experimental values for the melting temperature, density, and radial distribution function of sodium. The diffusion coefficient of liquid sodium increases linearly with temperature, and the homogeneous nucleation rate of melting in superheated sodium crystal exponentially increases with temperature. The findings provide theoretical support for applications involving heat and mass transfer in sodium-related systems.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Fabrication of epitaxial V2O3 thin films on Al2O3 substrates via mist chemical vapor deposition

Hisato Nishii, Shintarou Iida, Akira Yamasaki, Takumi Ikenoue, Masao Miyake, Toshiya Doi, Tetsuji Hirato

Summary: Epitaxial V2O3 films were fabricated on sapphire substrates using mist chemical vapor deposition (mist CVD) method, eliminating the need for high vacuum conditions. The films can be grown on sapphire substrates even under atmospheric pressure, with the optimal growth temperature at 823 K. The films grown at 823 K exhibit a metal-insulator transition at approximately 155 K. The film on C-plane sapphire exhibits a lower transition temperature compared to those on R- and A-plane sapphire substrates.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Controlling morphology of NiSb needles in InSb through low temperature gradient horizontal gradient freeze

Jani Jesenovec, Kevin Zawilski, Peter Alison, Stephan J. Meschter, Sambit K. Saha, Andrew J. Sepelak, Peter G. Schunemann

Summary: In this study, NiSb needles were successfully formed in InSb by manipulating the growth rate and adding NiSb. These needle structures in InSb can be used to tune the magnetoresistance of devices. Additionally, undoped InSb crystals demonstrated good infrared transmission at low growth rates.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Synthesis, crystal growth, and its characterization of 2-amino-4-methylpyridinium oxalate

D. Joseph Daniel, P. Karuppasamy, H. J. Kim

Summary: The 2-amino 4-methyl pyridinium oxalate (2A4MPO) compound was synthesized and its crystal structure, functional groups, thermal stability, electrical properties, and third-order nonlinear optical properties were studied. The results demonstrate that the synthesized crystal has good structural integrity, thermal stability, and potential for third-order nonlinear optical applications.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Twenty years crystal growth of solar silicon: My serendipity journey

C. W. Lan

Summary: The past two decades have witnessed a significant transformation in solar silicon crystal growth, especially in the competition between multi-crystalline silicon (Multi-Si) and mono-crystalline silicon (Mono-Si). The demand for this crucial material has exponentially surged, with silicon solar panels capturing over 95% of the global PV market share. The advancements in crystal growth technology during this period have set historical benchmarks, with the market share shifting from high-performance multi-crystalline silicon (HPM-Si) to CZ silicon.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Design and numerical analysis of a novel argon gas tube to reduce impurities in large size casting crystalline silicon furnace

Peiyao Hao, Lili Zheng, Hui Zhang

Summary: A novel design of argon gas tube for removing impurities during silicon ingot growth was developed, and numerical simulations showed that it can effectively extract SiO.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Dependence of reaction time in hydrothermal synthesis of MoS2 quantum dots: An investigation using optical tools and fractal analysis

Geetika Sahu, Chanchal Chakraborty, Subhadeep Roy, Souri Banerjee

Summary: This article discusses the novel fractal nature of hydrothermally synthesized MoS2 QDs. By adjusting the reaction time, the study found that the average size of QDs increases and then decreases with longer reaction times. STEM images indicate that shorter reaction times lead to sheet formation, while extended reaction times cause sheets to fragment into QDs.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

High-throughput thermodynamic study of SiC high-temperature chemical vapor deposition from TMS-H2

Pengjian Lu, Wei Huang, Junjun Wang, Haitao Yang, Shiyue Guo, Bin Li, Ting Wang, Chitengfei Zhang, Rong Tu, Song Zhang

Summary: A systematic study on the tetramethylsilane-hydorgen (TMS-H-2) system for the deposition of pure single-crystal SiC by high-temperature chemical vapor deposition (HTCVD) method is conducted. The study investigates the effect of temperature, pressure, and H-2:TMS ratio on the deposition conditions and provides a theoretical basis and guidance for improving the quality and cost of industrial production of single-crystal SiC.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Molten salt synthesis of A-site disordered niobate microcrystals with tetragonal tungsten bronze structure

Xinyu Jiang, Liangliang Liu, Yanqing Liu, Yan Wang, Zhaoping Hou

Summary: Investigation on the preparation of anisometric templated textured high entropy or multi-element doped ferroelectric ceramics was conducted using A-site disordered niobate microcrystals. The effects of process parameters on the morphology and chemical composition were studied, and the photocatalytic properties of the microcrystals were evaluated.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Synthesis and crystallinity integration of copper nanoparticles by reaction medium

Mobashsara Tabassum, Md. Ashraful Alam, Sabrina Mostofa, Raton Kumar Bishwas, Debasish Sarkar, Shirin Akter Jahan

Summary: In this study, high crystallinity copper nanoparticles were synthesized by altering the reaction medium at low temperatures. The results show that changing the reaction medium can reduce the surface energy of precursors and promote the formation of highly crystalline copper nanoparticles.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Cu2ZnGeSe4 single crystals: Growth, structure and temperature dependence of band gap

Ivan Bodnar, Vitaly V. Khoroshko, Veronika A. Yashchuk, Valery F. Gremenok, Mohsin Kazi, Mayeen U. Khandaker, Tatiana I. Zubar, Daria I. Tishkevich, Alex Trukhanov, Sergei Trukhanov

Summary: This work presents the production of single crystals of Cu2ZnGeSe4, a semiconducting quaternary compound, using a gas chemical method with iodine as a transporter. The phase state, crystal structure, and lattice constants of the synthesized samples were refined and determined. The band gap of Cu2ZnGeSe4 was calculated using transmission spectrum and it was found that the band gap increases by 12% with decreasing temperature in the range of 20-300 K.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Effect of growth temperature of NH3-MBE grown GaN-on-Si layers on donor concentration and leakage currents

Timur Malin, Igor Osinnykh, Vladimir Mansurov, Dmitriy Protasov, Sergey Ponomarev, Denis Milakhin, Konstantin Zhuravlev

Summary: The effect of growth temperature on the buffer leakage currents of GaN-on-Si layers was investigated. It was found that higher growth temperature results in lower leakage currents. The defects in GaN layers grown at different temperatures were studied using photoluminescence technique, and a correlation between leakage currents, structural perfection, and donor concentration in GaN-on-Si layers was established. It was also observed that reduced growth temperature leads to the formation of inversion domains.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Numerical study of continuous Czochralski (CCz) silicon single crystal growth in a double-side heater

Thi-Hoai-Thu Nguyen, Jyh-Chen Chen

Summary: The effect of heater power control on heat, flow, and oxygen transport for CCz crystal growth was studied. Shorter upper side heater design could improve crystal quality and growth, but with higher power consumption.

JOURNAL OF CRYSTAL GROWTH (2024)

Article Crystallography

Contributions to the development of crystal growth technologies

Peter Rudolph

Summary: This article presents an overview of selected contributions to the development of crystal growth technology by the Laudise Prize awardee 2023. It discusses various aspects such as shaped crystal growth, the correlation between melt structure and crystal quality, control of intrinsic defects and inclusions, prevention of dislocation cell patterns, and melt growth experiments under a travelling magnetic field.

JOURNAL OF CRYSTAL GROWTH (2024)