The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

Title
The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 335, Issue 1, Pages 51-57
Publisher
Elsevier BV
Online
2011-09-11
DOI
10.1016/j.jcrysgro.2011.09.003

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