Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD

Title
Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 322, Issue 1, Pages 33-37
Publisher
Elsevier BV
Online
2011-03-09
DOI
10.1016/j.jcrysgro.2011.03.004

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