Vapor-phase epitaxy of high-crystallinity GaN films using Ga2O vapor and NH3

Title
Vapor-phase epitaxy of high-crystallinity GaN films using Ga2O vapor and NH3
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 312, Issue 5, Pages 676-679
Publisher
Elsevier BV
Online
2009-12-22
DOI
10.1016/j.jcrysgro.2009.12.028

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