Step-flow growth of homoepitaxial ZnO thin layers by halide vapor phase epitaxy using ZnCl2 and H2O source gases

Published 2010 View Full Article

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Title
Step-flow growth of homoepitaxial ZnO thin layers by halide vapor phase epitaxy using ZnCl2 and H2O source gases
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 312, Issue 16-17, Pages 2324-2327
Publisher
Elsevier BV
Online
2010-05-08
DOI
10.1016/j.jcrysgro.2010.05.005

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