Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films

Published 2010 View Full Article

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Title
Investigation on crystalline structure, boron distribution, and residual stresses in freestanding boron-doped CVD diamond films
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 312, Issue 12-13, Pages 1986-1991
Publisher
Elsevier BV
Online
2010-03-23
DOI
10.1016/j.jcrysgro.2010.03.020

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