Influence of oxidation on the wetting behavior of liquid silicon on Si3N4-coated substrates

Title
Influence of oxidation on the wetting behavior of liquid silicon on Si3N4-coated substrates
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 312, Issue 16-17, Pages 2404-2410
Publisher
Elsevier BV
Online
2010-05-18
DOI
10.1016/j.jcrysgro.2010.05.006

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