Improvement in crystallinity and optical properties of ZnO epitaxial layers by thermal annealed ZnO buffer layers with oxygen plasma

Title
Improvement in crystallinity and optical properties of ZnO epitaxial layers by thermal annealed ZnO buffer layers with oxygen plasma
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 14, Pages 3568-3572
Publisher
Elsevier BV
Online
2009-05-16
DOI
10.1016/j.jcrysgro.2009.05.010

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