4.4 Article

Nitridation of (111)Al substrates for GaN growth by molecular beam epitaxy

Journal

JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 7, Pages 1994-1996

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2008.11.007

Keywords

RHEED; XPS; Molecular beam epitaxy; Nitrides

Funding

  1. Ministry of Education, Culture, Sports, Science and Technology [18560344]
  2. Grants-in-Aid for Scientific Research [18560344] Funding Source: KAKEN

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The GaN layers were grown by compound-source molecular beam epitaxy (CS-MBE) on (1 1 1) aluminum (Al) substrates with and without mitriclation. The melting point of Al substrates limits the growth temperature. The layers were grown at 650 degrees C. Reflection high-energy electron diffraction (RHEED) patterns of the layers indicate that the mitriclation is effective for GaN growth by CS-MBE on aluminum substrates. Photoluminescence was observed from the layer grown on the Al substrate with nitridation at RT. (C) 2008 Elsevier B.V. All rights reserved.

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