On-axis homoepitaxial growth on Si-face 4H–SiC substrates

Published 2008 View Full Article

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Title
On-axis homoepitaxial growth on Si-face 4H–SiC substrates
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 20, Pages 4424-4429
Publisher
Elsevier BV
Online
2008-07-14
DOI
10.1016/j.jcrysgro.2008.06.081

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