Influence of molybdenum bottom electrodes on crystal growth of aluminum nitride thin films

Title
Influence of molybdenum bottom electrodes on crystal growth of aluminum nitride thin films
Authors
Keywords
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Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 2, Pages 345-350
Publisher
Elsevier BV
Online
2007-10-30
DOI
10.1016/j.jcrysgro.2007.10.033

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