Thin MnO and NiO films grown using atomic layer deposition from ethylcyclopentadienyl type of precursors

Published 2008 View Full Article

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Title
Thin MnO and NiO films grown using atomic layer deposition from ethylcyclopentadienyl type of precursors
Authors
Keywords
-
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 310, Issue 24, Pages 5464-5468
Publisher
Elsevier BV
Online
2008-08-23
DOI
10.1016/j.jcrysgro.2008.08.031

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